An Introduction to Microelectromechanical Systems Engineering
By Nadim Maluf.
Description
Provides a nontechnical introduction to the exciting field of micro-electromechanical systems (MEMS) that describe in detail the materials used in producing MEMS-including silicon, polymers, and glass and quartz substrates-as well as MEMS design and fabrication for nozzles, pressure and inertial sensors, valves, displays, and other applications. DLC: Microelectromechanical systems. - from Amzon
ISBN(s)
9780890065815
